MEMS model order reduction method based on SPRIM

Xiangjuan Bian¹, Youping Gong², Liyun Zhen²

¹School of Faculty & technology, Zhejiang International Studies University, Hangzhou, 310012 China

²School of Mechanical Engineering Hangzhou Dianzi University, 310018, Hangzhou, China

According to large scale MEMS united constraints equations, the paper investigates model order reduction (MOR) techniques based on Structure Preserving Reduced-order Interconnect Macro modelling (SPRIM) method, which can be used to generate computationally efficient solutions for multiphasic MEMS simulation. To united constrained model, the high dimensionality of the original system state space is mapped to a suitable low-dimensional subspace, obtained a low-dimensional state sub-space model. A improved algorithms(SPRIM) from Arnoldi algorithms are implemented to extract low dimensional Krylov subspaces from Unified state subspace models for model order reduction, reduced order electro thermal–mechanical models are generated for a MEMS micro beam using the developed programs. Developed programs automatically generate compact structure preserving models and can be used to significantly improve the computational efficiency without much loss in accuracy and model stability for coupled-field MEMS simulation.